TitleMicroresonators with Q-factors over a million from highly stressed epitaxial silicon carbide on silicon
Publication TypeMiscellaneous
Year of Publication2014
AuthorsKermany AR, Brawley G, Mishra N, Sheridan E, Bowen WP, Iacopi F
URLhttp://scitation.aip.org/content/aip/journal/apl/104/8/10.1063/1.4866268

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